Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027344 | Film forming apparatus | Shinya Iwashita, Ayuta Suzuki, Takahiro SHINDO, Kazuki DEMPOH, Yasushi Morita +2 more | 2024-07-02 |
| 12020900 | Plasma processing device, and plasma processing method | Munehito KAGAYA, Satoru Kawakami, Tsuyoshi Moriya, Jun Yamawaku, Hiroyuki Onoda | 2024-06-25 |
| 11972921 | Temperature measurement system, temperature measurement method, and substrate processing apparatus | Takeshi Kobayashi | 2024-04-30 |