Issued Patents 2024
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176187 | Cleaning method and plasma processing apparatus | — | 2024-12-24 |
| 12165842 | Control method and plasma processing apparatus | Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2024-12-10 |
| 12125679 | Plasma processing apparatus and processing method | Gen TAMAMUSHI, Masahiro Inoue, Yuto KOSAKA, Shoichiro Matsuyama | 2024-10-22 |
| 12125672 | Plasma processing method and plasma processing apparatus | — | 2024-10-22 |
| 12057294 | Plasma processing apparatus and plasma processing method | Gen TAMAMUSHI, Masahiro Inoue | 2024-08-06 |
| 12046452 | Plasma processing apparatus | — | 2024-07-23 |
| 12020899 | Plasma processing apparatus and plasma processing method | — | 2024-06-25 |
| 11955314 | Plasma processing apparatus | — | 2024-04-09 |
| 11935727 | Substrate processing method | Jun Yamawaku | 2024-03-19 |
| 11908665 | Plasma processing apparatus and measurement method | Manabu Iwata | 2024-02-20 |
| 11875977 | Plasma processing apparatus and plasma processing method | — | 2024-01-16 |
| 11871503 | Plasma processing method and plasma processing apparatus | Takashi Dokan, Shinji Kubota | 2024-01-09 |