SK

Shinji Kubota

TL Tokyo Electron Limited: 4 patents #43 of 870Top 5%
Overall (2024): #42,966 of 561,600Top 8%
4
Patents 2024

Issued Patents 2024

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
12165842 Control method and plasma processing apparatus Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Koji Maruyama, Takashi Dokan 2024-12-10
12033832 Plasma processing method and plasma processing apparatus Kazuya Nagaseki, Shinji Himori, Koichi Nagami 2024-07-09
11898840 Measuring device and method of obtaining thickness of sheath 2024-02-13
11871503 Plasma processing method and plasma processing apparatus Takashi Dokan, Chishio Koshimizu 2024-01-09