Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165842 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Koji Maruyama, Takashi Dokan | 2024-12-10 |
| 12033832 | Plasma processing method and plasma processing apparatus | Kazuya Nagaseki, Shinji Himori, Koichi Nagami | 2024-07-09 |
| 11898840 | Measuring device and method of obtaining thickness of sheath | — | 2024-02-13 |
| 11871503 | Plasma processing method and plasma processing apparatus | Takashi Dokan, Chishio Koshimizu | 2024-01-09 |