Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165842 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama | 2024-12-10 |
| 11871503 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Chishio Koshimizu | 2024-01-09 |