TH

Taichi Hirano

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #251,424 of 561,600Top 45%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12165842 Control method and plasma processing apparatus Chishio Koshimizu, Toru HAYASAKA, Shinji Kubota, Koji Maruyama, Takashi Dokan 2024-12-10