Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154793 | Etching apparatus and etching method | Kazuya Nagaseki | 2024-11-26 |
| 12136535 | Plasma processing apparatus and plasma processing method | Tatsuro Ohshita | 2024-11-05 |
| 12033832 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Kazuya Nagaseki, Shinji Himori | 2024-07-09 |
| 12033833 | Filter circuit and plasma processing apparatus | Koji Yamagishi, Yuji Aota, Kota ISHIHARADA | 2024-07-09 |
| 11887817 | Plasma processing apparatus and plasma processing method | — | 2024-01-30 |