Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154793 | Etching apparatus and etching method | Koichi Nagami | 2024-11-26 |
| 12087591 | Plasma processing apparatus and system | Gen TAMAMUSHI | 2024-09-10 |
| 12033832 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Shinji Himori, Koichi Nagami | 2024-07-09 |
| 11981993 | Forming method of component and substrate processing system | Michishige Saito, Shota Kaneko | 2024-05-14 |
| 11967487 | Forming method of component and plasma processing apparatus | Michishige Saito, Shota Kaneko | 2024-04-23 |
| 11919032 | Film forming apparatus and method for manufacturing part having film containing silicon | Takayuki Ishii, Michishige Saito | 2024-03-05 |