Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125679 | Plasma processing apparatus and processing method | Chishio Koshimizu, Masahiro Inoue, Yuto KOSAKA, Shoichiro Matsuyama | 2024-10-22 |
| 12087591 | Plasma processing apparatus and system | Kazuya Nagaseki | 2024-09-10 |
| 12057294 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Masahiro Inoue | 2024-08-06 |
| 11984303 | Holding method of edge ring, plasma processing apparatus, and substrate processing system | — | 2024-05-14 |