Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125679 | Plasma processing apparatus and processing method | Chishio Koshimizu, Gen TAMAMUSHI, Masahiro Inoue, Yuto KOSAKA | 2024-10-22 |
| 12046457 | Electrostatic chuck, focus ring, support base, plasma processing apparatus, and plasma processing method | Yasuharu Sasaki, Yohei Uchida | 2024-07-23 |