Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046457 | Electrostatic chuck, focus ring, support base, plasma processing apparatus, and plasma processing method | Yasuharu Sasaki, Shoichiro Matsuyama | 2024-07-23 |
| 11984300 | Plasma processing apparatus | Takehiro Tanikawa, Shuhei Yamabe, Yasuharu Sasaki | 2024-05-14 |
| 11942357 | Workpiece placement apparatus and processing apparatus | Naoki Sugawa, Katsushi Abe, Tsuyoshi Hida | 2024-03-26 |