Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165896 | Substrate support and substrate processing apparatus | Akira Nagayama, Taketoshi TOMIOKA, Shin Yamaguchi | 2024-12-10 |
| 12046457 | Electrostatic chuck, focus ring, support base, plasma processing apparatus, and plasma processing method | Shoichiro Matsuyama, Yohei Uchida | 2024-07-23 |
| 12033886 | Plasma processing apparatus and method for manufacturing mounting stage | Ryo CHIBA, Akira Nagayama | 2024-07-09 |
| 11984300 | Plasma processing apparatus | Takehiro Tanikawa, Shuhei Yamabe, Yohei Uchida | 2024-05-14 |
| 11935729 | Substrate support and plasma processing apparatus | Hajime Tamura, Shin Yamaguchi, Tsuguto Sugawara, Katsuyuki Koizumi | 2024-03-19 |
| 11923171 | Plasma processing apparatus and plasma processing method | Junichi Sasaki, Hidetoshi Hanaoka, Tomohiko Akiyama | 2024-03-05 |
| 11908666 | Stage and plasma processing apparatus | Tsuguto Sugawara, Shin Yamaguchi, Hajime Tamura | 2024-02-20 |
| 11894218 | Electrostatic chuck, support platform, and plasma processing apparatus | Masato Takayama | 2024-02-06 |
| D1012051 | Electrostatic chuck for semiconductor manufacturing device | Masato Takayama | 2024-01-23 |