Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11894218 | Electrostatic chuck, support platform, and plasma processing apparatus | Yasuharu Sasaki | 2024-02-06 |
| D1012051 | Electrostatic chuck for semiconductor manufacturing device | Yasuharu Sasaki | 2024-01-23 |