MT

Masato Takayama

TL Tokyo Electron Limited: 2 patents #140 of 870Top 20%
Overall (2024): #137,257 of 561,600Top 25%
2
Patents 2024

Issued Patents 2024

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11894218 Electrostatic chuck, support platform, and plasma processing apparatus Yasuharu Sasaki 2024-02-06
D1012051 Electrostatic chuck for semiconductor manufacturing device Yasuharu Sasaki 2024-01-23