Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935729 | Substrate support and plasma processing apparatus | Hajime Tamura, Yasuharu Sasaki, Shin Yamaguchi, Katsuyuki Koizumi | 2024-03-19 |
| 11908666 | Stage and plasma processing apparatus | Yasuharu Sasaki, Shin Yamaguchi, Hajime Tamura | 2024-02-20 |