Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165896 | Substrate support and substrate processing apparatus | Akira Nagayama, Yasuharu Sasaki, Taketoshi TOMIOKA | 2024-12-10 |
| 12068143 | Temperature adjustment method | Akiyoshi Mitsumori | 2024-08-20 |
| 11935729 | Substrate support and plasma processing apparatus | Hajime Tamura, Yasuharu Sasaki, Tsuguto Sugawara, Katsuyuki Koizumi | 2024-03-19 |
| 11908666 | Stage and plasma processing apparatus | Yasuharu Sasaki, Tsuguto Sugawara, Hajime Tamura | 2024-02-20 |
| 11869799 | Temperature adjustment system | Akiyoshi Mitsumori | 2024-01-09 |