Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100252 | Passage propriety assessment device, passage management system, passage propriety assessment method, and computer program | — | 2024-09-24 |
| 11935729 | Substrate support and plasma processing apparatus | Yasuharu Sasaki, Shin Yamaguchi, Tsuguto Sugawara, Katsuyuki Koizumi | 2024-03-19 |
| 11908666 | Stage and plasma processing apparatus | Yasuharu Sasaki, Tsuguto Sugawara, Shin Yamaguchi | 2024-02-20 |