Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165896 | Substrate support and substrate processing apparatus | Akira Nagayama, Yasuharu Sasaki, Shin Yamaguchi | 2024-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165896 | Substrate support and substrate processing apparatus | Akira Nagayama, Yasuharu Sasaki, Shin Yamaguchi | 2024-12-10 |