Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165896 | Substrate support and substrate processing apparatus | Yasuharu Sasaki, Taketoshi TOMIOKA, Shin Yamaguchi | 2024-12-10 |
| 12033886 | Plasma processing apparatus and method for manufacturing mounting stage | Yasuharu Sasaki, Ryo CHIBA | 2024-07-09 |
| 11869755 | Cleaning method and protecting member | Shinya Sato | 2024-01-09 |