TA

Tomohiko Akiyama

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #239,452 of 561,600Top 45%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11923171 Plasma processing apparatus and plasma processing method Junichi Sasaki, Yasuharu Sasaki, Hidetoshi Hanaoka 2024-03-05