Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984300 | Plasma processing apparatus | Takehiro Tanikawa, Yohei Uchida, Yasuharu Sasaki | 2024-05-14 |
| 11978614 | Substrate processing apparatus | Yusuke Hayasaka, Jun Young Chung, Keiichi Yamaguchi, Takehiro Tanikawa | 2024-05-07 |
| 11869750 | Plasma processing apparatus | Yusuke Hayasaka, Takehiro Tanikawa, Yuki Machida, Jun Young Chung | 2024-01-09 |