Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12062527 | Baffle unit and substrate processing apparatus | Ryo Sasaki | 2024-08-13 |
| 11978614 | Substrate processing apparatus | Yusuke Hayasaka, Shuhei Yamabe, Keiichi Yamaguchi, Takehiro Tanikawa | 2024-05-07 |
| 11869750 | Plasma processing apparatus | Yusuke Hayasaka, Takehiro Tanikawa, Shuhei Yamabe, Yuki Machida | 2024-01-09 |