Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978614 | Substrate processing apparatus | Jun Young Chung, Shuhei Yamabe, Keiichi Yamaguchi, Takehiro Tanikawa | 2024-05-07 |
| 11869750 | Plasma processing apparatus | Takehiro Tanikawa, Shuhei Yamabe, Yuki Machida, Jun Young Chung | 2024-01-09 |