Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981993 | Forming method of component and substrate processing system | Michishige Saito, Kazuya Nagaseki | 2024-05-14 |
| 11967487 | Forming method of component and plasma processing apparatus | Michishige Saito, Kazuya Nagaseki | 2024-04-23 |