Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981993 | Forming method of component and substrate processing system | Kazuya Nagaseki, Shota Kaneko | 2024-05-14 |
| 11967487 | Forming method of component and plasma processing apparatus | Kazuya Nagaseki, Shota Kaneko | 2024-04-23 |
| 11919032 | Film forming apparatus and method for manufacturing part having film containing silicon | Takayuki Ishii, Kazuya Nagaseki | 2024-03-05 |