Issued Patents 2024
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183618 | Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool | Tejas Ulavi, Eric J. Hoffmann, Ashutosh Agarwal | 2024-12-31 |
| 12087555 | Method and system for cleaning a process chamber | Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL | 2024-09-10 |
| 12077861 | Dithering or dynamic offsets for improved uniformity | Joseph AuBuchon, Michael R. Rice, Arkaprava Dan, Hanhong Chen | 2024-09-03 |
| 12060638 | Deposition apparatus and methods using staggered pumping locations | Joseph AuBuchon, Ashutosh Agarwal | 2024-08-13 |
| 12057333 | Metrology slot plates | Kenneth Brian Doering, Vivek Shah, Ashutosh Agarwal, Shrihari Sampathkumar, Chunlei Zhang | 2024-08-06 |
| D1037778 | Gas distribution plate | Ashutosh Agarwal, Eric J. Hoffmann, Dhritiman Subha Kashyap, Kartik Shah, Amit Rajendra Sherekar | 2024-08-06 |
| 12020957 | Heater assembly with process gap control for batch processing chambers | Akshay Gunaji, Tejas Ulavi | 2024-06-25 |
| 12018376 | Apparatus and methods for motor shaft and heater leveling | Ashutosh Agarwal, Tejas Ulavi | 2024-06-25 |
| 11950384 | Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers | Akshay Gunaji, Uday Pai, Timothy J. Roggenbuck, Kalesh Panchaxari Karadi, Tejas Ulavi | 2024-04-02 |
| 11923172 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Mario David Silvetti | 2024-03-05 |
| 11894257 | Single wafer processing environments with spatial separation | Michael R. Rice, Joseph AuBuchon, Mandyam Sriram | 2024-02-06 |