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Illumination and detection apparatus for a metrology apparatus |
Nitesh Pandey, Simon Gijsbert Josephus Mathijssen, Kaustuve Bhattacharyya |
2024-12-03 |
| 12130246 |
Method for overlay metrology and apparatus thereof |
Simon Gijsbert Josephus Mathijssen, Kaustuve Bhattacharyya |
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| 12086973 |
Detection apparatus for simultaneous acquisition of multiple diverse images of an object |
Teunis Willem Tukker, Nitesh Pandey, Marinus Petrus REIJNDERS, Ferry Zijp |
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| 12066762 |
On chip sensor for wafer overlay measurement |
Mohamed Swillam, Stephen Roux, Tamer Elazhary |
2024-08-20 |
| 12067340 |
Computational wafer inspection |
Christophe David Fouquet, Bernardo Kastrup, Johannes Catharinus Hubertus Mulkens, James Benedict Kavanagh, James Patrick Koonmen +1 more |
2024-08-20 |
| 12061421 |
Method and system for determining information about a target structure |
Kaustuve Bhattacharyya, Keng-Fu Chang, Simon Gijsbert Josephus Mathijssen |
2024-08-13 |
| 12013647 |
Metrology method |
Simon Gijsbert Josephus Mathijssen, Marc Johannes Noot, Kaustuve Bhattacharyya, Grzegorz Grzela, Timothy Dugan Davis +4 more |
2024-06-18 |
| 12007700 |
Metrology system and method for determining a characteristic of one or more structures on a substrate |
Patricius Aloysius Jacobus Tinnemans, Armand Eugene Albert Koolen, Nitesh Pandey, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more |
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| 11953450 |
Diffraction based overlay metrology tool and method of diffraction based overlay metrology |
— |
2024-04-09 |
| 11947269 |
Method and apparatus to determine a patterning process parameter |
Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Thomas Theeuwes, Maria Isabel De La Fuente Valentin +2 more |
2024-04-02 |
| 11940739 |
Metrology apparatus |
Nitesh Pandey, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer +4 more |
2024-03-26 |