Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142535 | Method and apparatus to determine a patterning process parameter using a unit cell having geometric symmetry | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Paul Christiaan Hinnen, Elliott Gerard McNamara, Alok Verma +1 more | 2024-11-12 |
| 12007697 | Method for process metrology | Bert Verstraeten, Thomas Theeuwes | 2024-06-11 |
| 11982946 | Metrology targets | Nikhil Mehta, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij, Olger Victor Zwier, Jeroen COTTAAR +1 more | 2024-05-14 |
| 11940739 | Metrology apparatus | Nitesh Pandey, Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler +4 more | 2024-03-26 |