Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164233 | Metrology method and apparatus for of determining a complex-valued field | Alexander Prasetya KONIJNENBERG, Willem Marie Julia Marcel Coene | 2024-12-10 |
| 12158435 | Illumination and detection apparatus for a metrology apparatus | Simon Gijsbert Josephus Mathijssen, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef | 2024-12-03 |
| 12117734 | Metrology method and device for determining a complex-valued field | Alexander Prasetya KONIJNENBERG | 2024-10-15 |
| 12086973 | Detection apparatus for simultaneous acquisition of multiple diverse images of an object | Teunis Willem Tukker, Arie Jeffrey Den Boef, Marinus Petrus REIJNDERS, Ferry Zijp | 2024-09-10 |
| 12007700 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2024-06-11 |
| 11940739 | Metrology apparatus | Arie Jeffrey Den Boef, Duygu Akbulut, Marinus Johannes Maria Van Dam, Hans Butler, Hugo Augustinus Joseph Cramer +4 more | 2024-03-26 |
| 11927891 | Apparatus and methods for determining the position of a target structure on a substrate | Duygu Akbulut, Alessandro Polo, Sebastianus Adrianus GOORDEN | 2024-03-12 |