Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12025925 | Metrology method and lithographic apparatuses | Filippo ALPEGGIANI, Henricus Petrus Maria Pellemans, Simon Reinald HUISMAN | 2024-07-02 |
| 11940608 | Dark field microscope | — | 2024-03-26 |
| 11927891 | Apparatus and methods for determining the position of a target structure on a substrate | Nitesh Pandey, Duygu Akbulut, Alessandro Polo | 2024-03-12 |
| 11906906 | Metrology method and associated metrology and lithographic apparatuses | Simon Reinald HUISMAN, Arjan Johannes Anton Beukman | 2024-02-20 |