Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12124177 | Overlay measurement system using lock-in amplifier technique | Mohamed Swillam, Justin Kreuzer | 2024-10-22 |
| 12025925 | Metrology method and lithographic apparatuses | Filippo ALPEGGIANI, Henricus Petrus Maria Pellemans, Sebastianus Adrianus GOORDEN | 2024-07-02 |
| 11906906 | Metrology method and associated metrology and lithographic apparatuses | Sebastianus Adrianus GOORDEN, Arjan Johannes Anton Beukman | 2024-02-20 |