Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140872 | Optical designs of miniaturized overlay measurement system | Tamer Elazhary, Stephen Roux, Yevgeniy Konstantinovich Shmarev | 2024-11-12 |
| 12135505 | Spectrometric metrology systems based on multimode interference and lithographic apparatus | Justin Kreuzer, Stephen Roux | 2024-11-05 |
| 12124173 | Lithographic apparatus, metrology systems, illumination sources and methods thereof | Marinus Petrus REIJNDERS | 2024-10-22 |
| 12124177 | Overlay measurement system using lock-in amplifier technique | Simon Reinald HUISMAN, Justin Kreuzer | 2024-10-22 |
| 12066762 | On chip sensor for wafer overlay measurement | Stephen Roux, Tamer Elazhary, Arie Jeffrey Den Boef | 2024-08-20 |
| 11994808 | Lithographic apparatus, metrology systems, phased array illumination sources and methods thereof | Tamer Elazhary, Stephen Roux, Yuxiang Lin, Justin Kreuzer | 2024-05-28 |