Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140872 | Optical designs of miniaturized overlay measurement system | Mohamed Swillam, Tamer Elazhary, Yevgeniy Konstantinovich Shmarev | 2024-11-12 |
| 12135505 | Spectrometric metrology systems based on multimode interference and lithographic apparatus | Mohamed Swillam, Justin Kreuzer | 2024-11-05 |
| 12066762 | On chip sensor for wafer overlay measurement | Mohamed Swillam, Tamer Elazhary, Arie Jeffrey Den Boef | 2024-08-20 |
| 11994808 | Lithographic apparatus, metrology systems, phased array illumination sources and methods thereof | Mohamed Swillam, Tamer Elazhary, Yuxiang Lin, Justin Kreuzer | 2024-05-28 |