Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12135505 | Spectrometric metrology systems based on multimode interference and lithographic apparatus | Mohamed Swillam, Stephen Roux | 2024-11-05 |
| 12124177 | Overlay measurement system using lock-in amplifier technique | Mohamed Swillam, Simon Reinald HUISMAN | 2024-10-22 |
| 11994808 | Lithographic apparatus, metrology systems, phased array illumination sources and methods thereof | Mohamed Swillam, Tamer Elazhary, Stephen Roux, Yuxiang Lin | 2024-05-28 |