Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12158435 | Illumination and detection apparatus for a metrology apparatus | Nitesh Pandey, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef | 2024-12-03 |
| 12130246 | Method for overlay metrology and apparatus thereof | Arie Jeffrey Den Boef, Kaustuve Bhattacharyya | 2024-10-29 |
| 12061421 | Method and system for determining information about a target structure | Arie Jeffrey Den Boef, Kaustuve Bhattacharyya, Keng-Fu Chang | 2024-08-13 |
| 12032299 | Metrology method and associated metrology and lithographic apparatuses | Patricius Aloysius Jacobus Tinnemans, Igor Matheus Petronella Aarts, Kaustuve Bhattacharyya, Ralph Brinkhof, Leendert Jan KARSSEMEIJER +4 more | 2024-07-09 |
| 12013647 | Metrology method | Marc Johannes Noot, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Grzegorz Grzela, Timothy Dugan Davis +4 more | 2024-06-18 |
| 11886125 | Method for inferring a local uniformity metric | Kaustuve Bhattacharyya | 2024-01-30 |