Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032299 | Metrology method and associated metrology and lithographic apparatuses | Patricius Aloysius Jacobus Tinnemans, Kaustuve Bhattacharyya, Ralph Brinkhof, Leendert Jan KARSSEMEIJER, Stefan Carolus Jacobus Antonius Keij +4 more | 2024-07-09 |
| 11971665 | Wafer alignment using form birefringence of targets or product | Joshua Adams, Yuxiang Lin, Krishanu SHOME, Gerrit Johannes Nijmeijer | 2024-04-30 |
| 11899380 | Apparatus for and method of sensing alignment marks | Krishanu SHOME, Junwon Lee | 2024-02-13 |