Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11971665 | Wafer alignment using form birefringence of targets or product | Joshua Adams, Yuxiang Lin, Gerrit Johannes Nijmeijer, Igor Matheus Petronella Aarts | 2024-04-30 |
| 11899380 | Apparatus for and method of sensing alignment marks | Igor Matheus Petronella Aarts, Junwon Lee | 2024-02-13 |