Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11971665 | Wafer alignment using form birefringence of targets or product | Yuxiang Lin, Krishanu SHOME, Gerrit Johannes Nijmeijer, Igor Matheus Petronella Aarts | 2024-04-30 |
| 11906907 | Apparatus and method for determining a condition associated with a pellicle | Derk Servatius Gertruda Brouns, Aage Bendiksen, Richard David Jacobs, Andrew Judge, Veera Venkata Narasimha Narendra Phani KOTTAPALLI +5 more | 2024-02-20 |