Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112260 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Lorenzo Tripodi, Patrick Warnaar, Grzegorz Grzela, Mohammadreza Hajiahmadi, Farzad Farhadzadeh +5 more | 2024-10-08 |
| 12066764 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patrick Warnaar, Vasco Tomas Tenner, Maurits Van Der Schaar | 2024-08-20 |
| 12032299 | Metrology method and associated metrology and lithographic apparatuses | Igor Matheus Petronella Aarts, Kaustuve Bhattacharyya, Ralph Brinkhof, Leendert Jan KARSSEMEIJER, Stefan Carolus Jacobus Antonius Keij +4 more | 2024-07-09 |
| 12007700 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Nitesh Pandey, Vasco Tomas Tenner, Willem Marie Julia Marcel Coene +1 more | 2024-06-11 |