Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112260 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Lorenzo Tripodi, Grzegorz Grzela, Mohammadreza Hajiahmadi, Farzad Farhadzadeh, Patricius Aloysius Jacobus Tinnemans +5 more | 2024-10-08 |
| 12105432 | Metrology method and associated computer product | Narjes JAVAHERI, Maurits Van Der Schaar, Tieh-Ming Chang, Hilko Dirk Bos, Samira Bahrami +3 more | 2024-10-01 |
| 12066764 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Vasco Tomas Tenner, Maurits Van Der Schaar | 2024-08-20 |
| 12019377 | Target for measuring a parameter of a lithographic process | Maurits Van Der Schaar, Olger Victor Zwier | 2024-06-25 |
| 12007700 | Metrology system and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Nitesh Pandey, Vasco Tomas Tenner +1 more | 2024-06-11 |
| 11982946 | Metrology targets | Nikhil Mehta, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij, Hugo Augustinus Joseph Cramer, Olger Victor Zwier +1 more | 2024-05-14 |