Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12019377 | Target for measuring a parameter of a lithographic process | Maurits Van Der Schaar, Patrick Warnaar | 2024-06-25 |
| 12013647 | Metrology method | Simon Gijsbert Josephus Mathijssen, Marc Johannes Noot, Kaustuve Bhattacharyya, Arie Jeffrey Den Boef, Grzegorz Grzela +4 more | 2024-06-18 |
| 11982946 | Metrology targets | Nikhil Mehta, Maurits Van Der Schaar, Markus Gerardus Martinus Maria Van Kraaij, Hugo Augustinus Joseph Cramer, Jeroen COTTAAR +1 more | 2024-05-14 |