Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105432 | Metrology method and associated computer product | Narjes JAVAHERI, Tieh-Ming Chang, Hilko Dirk Bos, Patrick Warnaar, Samira Bahrami +3 more | 2024-10-01 |
| 12066764 | Metrology apparatus and method for determining a characteristic of one or more structures on a substrate | Patricius Aloysius Jacobus Tinnemans, Patrick Warnaar, Vasco Tomas Tenner | 2024-08-20 |
| 12019377 | Target for measuring a parameter of a lithographic process | Olger Victor Zwier, Patrick Warnaar | 2024-06-25 |
| 11982946 | Metrology targets | Nikhil Mehta, Markus Gerardus Martinus Maria Van Kraaij, Hugo Augustinus Joseph Cramer, Olger Victor Zwier, Jeroen COTTAAR +1 more | 2024-05-14 |