Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142535 | Method and apparatus to determine a patterning process parameter using a unit cell having geometric symmetry | Adriaan Johan Van Leest, Anagnostis Tsiatmas, Elliott Gerard McNamara, Alok Verma, Thomas Theeuwes +1 more | 2024-11-12 |
| 11947269 | Method and apparatus to determine a patterning process parameter | Anagnostis Tsiatmas, Elliott Gerard McNamara, Thomas Theeuwes, Maria Isabel De La Fuente Valentin, Mir Homayoun Shahrjerdy +2 more | 2024-04-02 |