Issued Patents 2023
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815816 | Apparatus for post exposure bake of photoresist | Douglas A. Buchberger, Jr., Dmitry Lubomirsky, John O. Dukovic | 2023-11-14 |
| 11798606 | Additive patterning of semiconductor film stacks | John O. Dukovic, Ellie Yieh, Praburam Gopalraja, Steven Hiloong WELCH, Bhargav S. Citla | 2023-10-24 |
| 11756828 | Cluster processing system for forming a transition metal material | Keith Tatseun Wong, Ellie Yieh | 2023-09-12 |
| 11756803 | Gas delivery system for high pressure processing chamber | Qiwei Liang, Sean S. Kang, Adib Khan, Ellie Yieh | 2023-09-12 |
| 11749555 | Semiconductor processing system | Sultan Malik, Qiwei Liang, Adib Khan | 2023-09-05 |
| 11725274 | Integrated cluster tool for selective area deposition | Tobin Kaufman-Osborn, Ludovic Godet, Qiwei Liang, Adib Khan | 2023-08-15 |
| 11682556 | Methods of improving graphene deposition for processes using microwave surface-wave plasma on dielectric materials | Jie Zhou, Erica Chen, Qiwei Liang, Chentsau Chris Ying, Ellie Yieh | 2023-06-20 |
| 11664215 | High selectivity atomic later deposition process | Christopher Ahles, Jong Hun Choi, Andrew C. Kummel, Keith Tatseun Wong | 2023-05-30 |
| 11650506 | Film structure for electric field guided photoresist patterning process | Huixiong Dai, Mangesh Ashok BANGAR, Christopher S. Ngai, Ellie Yieh, Steven Hiloong WELCH | 2023-05-16 |
| 11631591 | Methods for depositing dielectric material | Bhargav S. Citla, Jethro Tannos, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua +1 more | 2023-04-18 |
| 11626284 | Method of forming a 2-dimensional channel material, using ion implantation | Keith Tatseun Wong, Hurshvardhan Srivastava, Johannes M. van Meer, Rajesh Prasad | 2023-04-11 |
| 11621226 | Graphene diffusion barrier | Yong Wu, Srinivas Gandikota, Abhijit Basu Mallick | 2023-04-04 |
| 11609505 | Apparatus and methods for verification and re-use of process fluids | Mangesh Ashok BANGAR, Gautam Pisharody, Lancelot HUANG, Alan Tso, Douglas A. Buchberger, Jr. +3 more | 2023-03-21 |
| 11581183 | Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom | Bhargav S. Citla, Mei-Yee Shek | 2023-02-14 |
| 11566325 | Silicon carbonitride gapfill with tunable carbon content | Mei-Yee Shek, Bhargav S. Citla, Joshua Rubnitz, Jethro Tannos, Chentsau Chris Ying +1 more | 2023-01-31 |
| 11542597 | Selective deposition of metal oxide by pulsed chemical vapor deposition | Keith Tatseun Wong, Andrew C. Kummel, James P. Huang, Yunil Cho | 2023-01-03 |