Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848176 | Plasma processing using pulsed-voltage and radio-frequency power | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +3 more | 2023-12-19 |
| 11791138 | Automatic electrostatic chuck bias compensation during plasma processing | Linying Cui, James Rogers | 2023-10-17 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2023-10-03 |
| 11728124 | Creating ion energy distribution functions (IEDF) | Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus, Rajinder Dhindsa +1 more | 2023-08-15 |
| 11699572 | Feedback loop for controlling a pulsed voltage waveform | Evgeny Kamenetskiy, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2023-07-11 |
| 11668553 | Apparatus and method for controlling edge ring variation | Sathyendra Ghantasala, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau, Rajinder Dhindsa +1 more | 2023-06-06 |
| 11587766 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2023-02-21 |