Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488836 | Apparatus for substrate processing | Masahiro Tabata, Toru Hisamatsu, Sho Kumakura, Ryuichi Asako, Masanobu Honda | 2022-11-01 |
| 11476123 | Etching method, plasma processing apparatus, and substrate processing system | Takayuki Katsunuma, Masanobu Honda, Yuta NAKANE | 2022-10-18 |
| 11469111 | Substrate processing method and plasma processing apparatus | Toru Hisamatsu | 2022-10-11 |
| 11459655 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Sho Kumakura, Masanobu Honda, Yoshihide Kihara | 2022-10-04 |
| 11421323 | Stage and electrode member | Daisuke Hayashi | 2022-08-23 |
| 11355350 | Etching method, substrate processing apparatus, and substrate processing system | Kenta ONO, Maju TOMURA, Masanobu Honda | 2022-06-07 |
| 11330972 | Oblique-viewing endoscope | — | 2022-05-17 |
| 11328933 | Etching method, substrate processing apparatus, and substrate processing system | Kenta ONO, Masanobu Honda | 2022-05-10 |
| 11264236 | Substrate processing method | Toru Hisamatsu, Takayuki Katsunuma, Yoshihide Kihara, Masanobu Honda | 2022-03-01 |
| 11244804 | Etching method, plasma processing apparatus, and processing system | Daisuke Nishide, Toru Hisamatsu | 2022-02-08 |