Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501975 | Substrate processing method and substrate processing apparatus | Takayuki Katsunuma | 2022-11-15 |
| 11244804 | Etching method, plasma processing apparatus, and processing system | Toru Hisamatsu, Shinya Ishikawa | 2022-02-08 |