Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495469 | Method for processing substrates | Masanobu Honda, Yoshihide Kihara | 2022-11-08 |
| 11488836 | Apparatus for substrate processing | Masahiro Tabata, Sho Kumakura, Ryuichi Asako, Shinya Ishikawa, Masanobu Honda | 2022-11-01 |
| 11469111 | Substrate processing method and plasma processing apparatus | Shinya Ishikawa | 2022-10-11 |
| 11459655 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Shinya Ishikawa, Sho Kumakura, Masanobu Honda, Yoshihide Kihara | 2022-10-04 |
| 11264236 | Substrate processing method | Takayuki Katsunuma, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda | 2022-03-01 |
| 11244804 | Etching method, plasma processing apparatus, and processing system | Daisuke Nishide, Shinya Ishikawa | 2022-02-08 |
| 11244828 | Method for processing workpiece | Yoshihide Kihara, Tomoyuki Oishi | 2022-02-08 |