Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488836 | Apparatus for substrate processing | Masahiro Tabata, Toru Hisamatsu, Ryuichi Asako, Shinya Ishikawa, Masanobu Honda | 2022-11-01 |
| 11459655 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Masanobu Honda, Yoshihide Kihara | 2022-10-04 |
| 11450537 | Substrate processing method and substrate processing apparatus | Hironari Sasagawa, Maju TOMURA, Yoshihide Kihara | 2022-09-20 |
| 11380555 | Etching method and etching apparatus | Maju TOMURA, Hironari Sasagawa, Yoshihide Kihara | 2022-07-05 |
| 11239090 | Plasma processing method and plasma processing apparatus | Masahiro Tabata | 2022-02-01 |