Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538693 | Substrate processing method and substrate processing system | — | 2022-12-27 |
| 11488836 | Apparatus for substrate processing | Masahiro Tabata, Toru Hisamatsu, Sho Kumakura, Shinya Ishikawa, Masanobu Honda | 2022-11-01 |
| 11456184 | Substrate processing method and substrate processing system | Tatsuya Yamaguchi | 2022-09-27 |