Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488836 | Apparatus for substrate processing | Toru Hisamatsu, Sho Kumakura, Ryuichi Asako, Shinya Ishikawa, Masanobu Honda | 2022-11-01 |
| 11380551 | Method of processing target object | Yoshihide Kihara | 2022-07-05 |
| 11322354 | Workpiece processing method | — | 2022-05-03 |
| 11289339 | Plasma processing method and plasma processing apparatus | — | 2022-03-29 |
| 11239090 | Plasma processing method and plasma processing apparatus | Sho Kumakura | 2022-02-01 |