Issued Patents 2022
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495469 | Method for processing substrates | Toru Hisamatsu, Masanobu Honda | 2022-11-08 |
| 11495468 | Etching method and etching apparatus | Takahiro Yokoyama, Maju TOMURA, Masanobu Honda | 2022-11-08 |
| 11459655 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Sho Kumakura, Masanobu Honda | 2022-10-04 |
| 11456180 | Etching method | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2022-09-27 |
| 11450537 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Hironari Sasagawa, Maju TOMURA | 2022-09-20 |
| 11417535 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Maju TOMURA, Satoshi OHUCHIDA | 2022-08-16 |
| 11380555 | Etching method and etching apparatus | Maju TOMURA, Sho Kumakura, Hironari Sasagawa | 2022-07-05 |
| 11380551 | Method of processing target object | Masahiro Tabata | 2022-07-05 |
| 11367610 | Film forming and process container cleaning method | Takahiro Yokoyama | 2022-06-21 |
| 11270889 | Etching method and etching apparatus | Maju TOMURA, Masanobu Honda | 2022-03-08 |
| 11264236 | Substrate processing method | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Masanobu Honda | 2022-03-01 |
| 11244828 | Method for processing workpiece | Toru Hisamatsu, Tomoyuki Oishi | 2022-02-08 |